Dust Successive Generations in Ar/SiH4 : Dust Cloud Dynamics
نویسنده
چکیده
Silane-based plasmas are widely used to deposit nanostructured silicon thin films or to synthesize silicon nanoparticles. Dust particle formation in Ar/SiH4 plasmas is a continuous phenomenon: as long as silane precursors are provided, new dust generations are formed. Successive generations can be monitored thanks to various electrical (Vdc/3H) and optical (OES, video imaging) diagnostics. Experiments presented in this paper have been performed in a capacitively-coupled radiofrequency discharge, at low pressure (12 Pa) in an Argon/Silane mixture (92:8).
منابع مشابه
Dust cloud dynamics during particle successive generations
Silane-based plasmas are widely used to deposit nanostructured silicon thin films or to synthesize silicon nanoparticles. Dust particle formation in Ar/SiH4 plasmas is a continuous phenomenon: as long as silane precursors are provided, new dust generations are formed. Successive generations can be monitored thanks to various electrical (Vdc/3H) and optical (OES, video imaging) diagnostics. Expe...
متن کاملDust Growth Instabilities in Silane-based Plasmas
In this paper we report on two instabilities observed in dusty plasmas, at different stages of dust particle formation. Experiments are performed in a low-pressure Ar/SiH4 radiofrequency plasma. The first instability, occuring at the transition between nanocrystal accumulation and coalescence phases, is very sensitive to operating conditions. It is shown to be a good indicator of the end of nan...
متن کاملSuccessive generations of dust in complex plasmas: a cyclic phenomenon in the void region.
Dust formation and growth in plasmas are in most cases continuous cyclic phenomena. We show that the growth of new dust generations takes place in a dust-free region, usually called a void, in the dust cloud. The three-step process of new dust generation is detailed thanks to the correlation between electrical, optical, and ex situ diagnostics. The strong inhomogeneity of both the plasma and th...
متن کاملThreshold Phenomena in a Throbbing Dusty Plasma
A dust cloud trapped in a plasma often contains a dust-free region ("void") near the plasma center. This void has important effects [1, 2]: it induces a spatial inhomogeneity of the dust particle distribution and is at the origin of many intricate unstable phenomena. One of this behavior is the heartbeat instability consisting of successive contractions and expansions of the void [3]. This inst...
متن کاملFormation of single-crystal silicon nanoparticles at very low gas temperature in a rf silane-based discharge
Introduction The synthesis of single-crystal silicon nanocrystals we present is performed in the gas phase of a radio frequency (rf) discharge. The plasma is produced in a discharge box, enclosed in a vacuum vessel, containing an Ar/SiH4 mixture (92:8). The typical pressure is 0.12 mbar while typical rf injected power is 10 W. Gas temperature can be decreased to -40 oC. Dust particle formation ...
متن کامل